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Process
Metal
Name
type
Usage & Feature
Dryfilm strip
Cu,A42
DF-90
L
Addition to conventional NaOH process
DF-100
L
Without NaOH, Clean strip of dry film
stripper
Ag
UniSil-80
L
Neutral Acid, Fast speed, No Cu corrosion, Long life
Cu etchant
Cu
SUE-50
L
Cu etchant for high pitch pattern, Etching factor > 5
 
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